Inventor · disambiguated record
Aurélien Fay
Also filed as: FAY AURÉLIEN
2 granted patents·0 citations·filing 2015–2018
22Inventor score
Files withCOMMISSARIAT ENERGIE ATOMIQUE2
Top patents by PatentIndex Score
2 records- 0138US10423074B2Method for calculating the metrics of an IC manufacturing processCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2015·Granted Sep 24, 2019·0 cites·16 claims
- 0230US10573492B2Calibration of elementary small patterns in variable-shaped-beam electron-beam lithographyCOMMISSARIAT ENERGIE ATOMIQUE·Filed 2018·Granted Feb 25, 2020·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →