Inventor · disambiguated record
Aubrey L. Helms, Jr.
Also filed as: HELMS AUBREY L · HELMS AUBREY L JR · HELMS JR AUBREY L · HELMS JR AUBREY LYNN
3 granted patents·4 pending applications·691 citations·filing 1989–2011
80Inventor score
Top patents by PatentIndex Score
7 records- 0196US7205247B2Atomic layer deposition of hafnium-based high-k dielectricAVIZA TECH INC·Filed 2004·Granted Apr 17, 2007·563 cites·13 claims
- 0283US5066615APhotolithographic processes using thin coatings of refractory metal silicon nitrides as antireflection layersAT & T BELL LAB·Filed 1990·Granted Nov 19, 1991·90 cites·21 claims
- 0374US5106786AThin coatings for use in semiconductor integrated circuits and processes as antireflection coatings consisting of tungsten silicideAT & T BELL LAB·Filed 1989·Granted Apr 21, 1992·38 cites·2 claims
- 0443US2005227017A1Low temperature deposition of silicon nitrideSENZAKI YOSHIHIDE·Filed 2004·Application pending·0 cites
- 0535US2012085281A1Apparatus with multiple heating systems for in-line thermal treatment of substratesHELMS JR AUBREY L·Filed 2011·Application pending·0 cites
- 0630US2003104707A1System and method for improved thin dielectric filmsFiled 2002·Application pending·0 cites
- 0728US2012125466A1Apparatus and method for surface treatment in a furnaceREYNOLDS REESE M·Filed 2011·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →