Inventor · disambiguated record
Axel Feicke
Also filed as: FEICKE AXEL
2 granted patents·2 citations·filing 2006–2007
34Inventor score
Files withADVANCED MASK TECHNOLOGY CT GMBH2
Top patents by PatentIndex Score
2 records- 0154US7820343B2Method for producing a photomask, method for patterning a layer or layer stack and resist stack on a mask substrateADVANCED MASK TECHNOLOGY CT GMBH·Filed 2007·Granted Oct 26, 2010·2 cites·11 claims
- 0232US7811727B2Method for determining an exposure dose and exposure apparatusADVANCED MASK TECHNOLOGY CT GMBH·Filed 2006·Granted Oct 12, 2010·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →