Inventor · disambiguated record
Ayumi Higuchi
Also filed as: HIGUCHI AYUMI
25 granted patents·6 pending applications·40 citations·filing 2005–2024
93Inventor score
Top patents by PatentIndex Score
31 records- 0183US9984903B2Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 29, 2018·4 cites·1 claims
- 0282US8888925B2Nozzle, substrate processing apparatus, and substrate processing methodSATO MASANOBU·Filed 2012·Granted Nov 18, 2014·6 cites·3 claims
- 0380US7981286B2Substrate processing apparatus and method of removing particlesDAINIPPON SCREEN MFG·Filed 2005·Granted Jul 19, 2011·7 cites·6 claims
- 0480US7392814B2Substrate processing apparatus and methodDAINIPPON SCREEN MFG·Filed 2005·Granted Jul 1, 2008·5 cites·3 claims
- 0576US11413662B2Substrate cleaning apparatus and substrate cleaning methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted Aug 16, 2022·2 cites·22 claims
- 0673US10312114B2Substrate processing method, and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2014·Granted Jun 4, 2019·3 cites·7 claims
- 0773US9548197B2Substrate treatment method and substrate treatment apparatusDAINIPPON SCREEN MFG·Filed 2014·Granted Jan 17, 2017·3 cites·9 claims
- 0870US10651029B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted May 12, 2020·2 cites·16 claims
- 0970US9768042B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2015·Granted Sep 19, 2017·2 cites·10 claims
- 1066US10622204B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Granted Apr 14, 2020·1 cites·12 claims
- 1166US9230836B2Substrate treatment methodHIGUCHI AYUMI·Filed 2012·Granted Jan 5, 2016·4 cites·6 claims
- 1261US7841788B2Substrate processing apparatus and substrate processing methodDAINIPPON SCREEN MFG·Filed 2007·Granted Nov 30, 2010·1 cites·18 claims
- 1360US2025050385A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2024·Application pending·0 cites
- 1457US11919051B2Substrate cleaning apparatus and substrate cleaning methodSCREEN HOLDINGS CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·36 claims
- 1554US11881403B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2020·Granted Jan 23, 2024·0 cites·9 claims
- 1652US2015053244A1Nozzle, and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2014·Application pending·0 cites
- 1752US2015090301A1Treatment cup cleaning method, substrate treatment method, and substrate treatment apparatusDAINIPPON SCREEN MFG·Filed 2014·Application pending·0 cites
- 1851US11145516B2Substrate processing method and substrate processing apparatusSCREEN HOLDINGS CO LTD·Filed 2019·Granted Oct 12, 2021·0 cites·15 claims
- 1948US2023205178A1Substrate processing apparatus, substrate processing method, training data generating method, training method, training device, trained model generating method, and trained modelSCREEN HOLDINGS CO LTD·Filed 2021·Application pending·0 cites
- 2046US11410853B2Substrate processing method and substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2020·Granted Aug 9, 2022·0 cites·19 claims
- 2144US11260436B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2020·Granted Mar 1, 2022·0 cites·10 claims
- 2243US11018017B2Substrate treatment methodSCREEN HOLDINGS CO LTD·Filed 2017·Granted May 25, 2021·0 cites·7 claims
- 2342US10816141B2Chemical solution feeder, substrate treatment apparatus, method for feeding chemical solution, and method for treating substrateSCREEN HOLDINGS CO LTD·Filed 2018·Granted Oct 27, 2020·0 cites·14 claims
- 2442US10710913B2Waste liquid treatment method and waste liquid treatment apparatusSCREEN HOLDINGS CO LTD·Filed 2016·Granted Jul 14, 2020·0 cites·2 claims
- 2542US9508568B2Substrate processing apparatus and substrate processing method for performing cleaning treatment on substrateDAINIPPON SCREEN MFG·Filed 2014·Granted Nov 29, 2016·0 cites·7 claims
- 2640US11217461B2Substrate processing deviceSCREEN HOLDINGS CO LTD·Filed 2017·Granted Jan 4, 2022·0 cites·6 claims
- 2737US10717117B2Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Jul 21, 2020·0 cites·7 claims
- 2836US11094564B2Processing liquid supplying apparatus, substrate processing apparatus and processing liquid supplying methodSCREEN HOLDINGS CO LTD·Filed 2018·Granted Aug 17, 2021·0 cites·22 claims
- 2935US2016293447A1Substrate processing apparatus and substrate processing methodSCREEN HOLDINGS CO LTD·Filed 2016·Application pending·0 cites
- 3034US10840083B2Substrate cleaning method, method for creating substrate cleaning recipe, and device for creating substrate cleaning recipeSCREEN HOLDINGS CO LTD·Filed 2017·Granted Nov 17, 2020·0 cites·2 claims
- 3132US2017014873A1Substrate processing system and pipe cleaning methodSCREEN HOLDINGS CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →