Inventor · disambiguated record
Ayako Sugaya
Also filed as: SUGAYA AYAKO
6 granted patents·372 citations·filing 1994–1997
88Inventor score
Technology areasG03F
Files withNIKON CORP6
Top patents by PatentIndex Score
6 records- 0192US5754299AInspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatusNIKON CORP·Filed 1996·Granted May 19, 1998·101 cites·56 claims
- 0291US5680200AInspection apparatus and method for optical system, exposure apparatus provided with the inspection apparatus, and alignment apparatus and optical system thereof applicable to the exposure apparatusNIKON CORP·Filed 1996·Granted Oct 21, 1997·89 cites·34 claims
- 0387US5783833AMethod and apparatus for alignment with a substrate, using coma imparting opticsNIKON CORP·Filed 1995·Granted Jul 21, 1998·75 cites·19 claims
- 0486US5859707APosition detection apparatus and aligner comprising sameNIKON CORP·Filed 1997·Granted Jan 12, 1999·64 cites·36 claims
- 0566US5684569APosition detecting apparatus and projection exposure apparatusNIKON CORP·Filed 1994·Granted Nov 4, 1997·21 cites·18 claims
- 0662US5936253APosition detector and microlithography apparatus comprising sameNIKON CORP·Filed 1997·Granted Aug 10, 1999·22 cites·29 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →