Inventor · disambiguated record
Bernard Auda
Also filed as: AUDA BERNARD
4 granted patents·445 citations·filing 1987–1992
83Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0191US5578161AMethod and apparatus for in-situ and on-line monitoring of trench formation processIBM·Filed 1992·Granted Nov 26, 1996·237 cites·15 claims
- 0289US4814041AMethod of forming a via-hole having a desired slope in a photoresist masked composite insulating layerIBM·Filed 1987·Granted Mar 21, 1989·119 cites·6 claims
- 0373US5139904AMethod of producing high resolution and reproducible patternsAUDA BERNARD·Filed 1990·Granted Aug 18, 1992·66 cites·12 claims
- 0451US5223914AFollow-up system for etch process monitoringIBM·Filed 1992·Granted Jun 29, 1993·23 cites·4 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →