Inventor · disambiguated record
Benny Ku
Also filed as: KU BENNY
3 granted patents·1 pending application·1 citations·filing 2019–2024
56Inventor score
Top patents by PatentIndex Score
4 records- 0185US2025053076A1Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0283US12164221B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2023·Granted Dec 10, 2024·0 cites·20 claims
- 0375US11454877B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 27, 2022·1 cites·20 claims
- 0473US11762280B2Extreme ultraviolet light reflective structure including nano-lattice and manufacturing method thereofTAIWAN SEMICONDUCTOR MAUFACTURING COMPANY LTD·Filed 2022·Granted Sep 19, 2023·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →