Inventor · disambiguated record
Bernhard Loidl
Also filed as: LOIDL BERNHARD
2 granted patents·4 pending applications·0 citations·filing 2003–2019
22Inventor score
Top patents by PatentIndex Score
6 records- 0148US12198945B2Vapor delivery head for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structuresLAM RES AG·Filed 2019·Granted Jan 14, 2025·0 cites·18 claims
- 0233US9887122B2Method and apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Granted Feb 6, 2018·0 cites·37 claims
- 0332US2005234255A1Electrochemical method for the production of organofunctional silanesKAMMEL THOMAS·Filed 2003·Application pending·0 cites
- 0429US2018096879A1Spin chuck including edge ringLAM RES AG·Filed 2016·Application pending·0 cites
- 0528US2018040502A1Apparatus for processing wafer-shaped articlesLAM RES AG·Filed 2016·Application pending·0 cites
- 0624US2017162426A1Spin chuck with gas leakage preventionLAM RES AG·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →