Inventor · disambiguated record
Bernhard Poschenrieder
Also filed as: POSCHENRIEDER BERNHARD
8 granted patents·422 citations·filing 1995–1996
91Inventor score
Top patents by PatentIndex Score
8 records- 0190US5815247AAvoidance of pattern shortening by using off axis illumination with dipole and polarizing aperturesSIEMENS AG·Filed 1995·Granted Sep 29, 1998·90 cites·9 claims
- 0285US6294026B1Distribution plate for a reaction chamber with multiple gas inlets and separate mass flow control loopsSIEMENS AG·Filed 1996·Granted Sep 25, 2001·73 cites·20 claims
- 0382US5712698AIndependently controllable shutters and variable area apertures for off axis illuminationSIEMENS AG·Filed 1996·Granted Jan 27, 1998·52 cites·10 claims
- 0480US5605600AEtch profile shaping through wafer temperature controlIBM·Filed 1995·Granted Feb 25, 1997·61 cites·26 claims
- 0579US5792685AThree-dimensional device layout having a trench capacitorSIEMENS AG·Filed 1996·Granted Aug 11, 1998·39 cites·1 claims
- 0675US5893735AThree-dimensional device layout with sub-groundrule featuresSIEMENS AG·Filed 1996·Granted Apr 13, 1999·34 cites·1 claims
- 0774US5723381AFormation of self-aligned overlapping bitline contacts with sacrificial polysilicon fill-in studSIEMENS AG·Filed 1995·Granted Mar 3, 1998·36 cites·17 claims
- 0868US5776808APad stack with a poly SI etch stop for TEOS mask removal with RIESIEMENS AG·Filed 1996·Granted Jul 7, 1998·37 cites·30 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →