Inventor · disambiguated record
Bernd Warm
Also filed as: WARM BERND
2 granted patents·55 citations·filing 1990–2005
65Inventor score
Top patents by PatentIndex Score
2 records- 0193US7473907B2Illumination system for a wavelength of ≦ 193 nm, with sensors for determining an illuminationZEISS CARL SMT AG·Filed 2005·Granted Jan 6, 2009·26 cites·29 claims
- 0270US5101091AArrangement for the guidance of a beam during the treatment of a workpiece with a laserDIEHL GMBH & CO·Filed 1990·Granted Mar 31, 1992·29 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →