Inventor · disambiguated record
Birol Kuyel
Also filed as: KUEYEL BIROL · KUYEL BIROL
17 granted patents·1 pending application·448 citations·filing 1979–2024
94Inventor score
Files withNANO MASTER INC9AT & T TECHNOLOGIES INC5WESTERN ELECTRIC CO2AMERICAN TELEPHONE AND TELGRAP1
Top patents by PatentIndex Score
18 records- 0198US4282267AMethods and apparatus for generating plasmasWESTERN ELECTRIC CO·Filed 1980·Granted Aug 4, 1981·205 cites·25 claims
- 0297US11087959B2Techniques for a hybrid design for efficient and economical plasma enhanced atomic layer deposition (PEALD) and plasma enhanced chemical vapor deposition (PECVD)NANO MASTER INC·Filed 2020·Granted Aug 10, 2021·8 cites·20 claims
- 0395US9972501B1Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)NANO MASTER INC·Filed 2017·Granted May 15, 2018·16 cites·15 claims
- 0494US4333814AMethods and apparatus for improving an RF excited reactive gas plasmaWESTERN ELECTRIC CO·Filed 1979·Granted Jun 8, 1982·44 cites·2 claims
- 0587US6730176B2Single wafer megasonic cleaner method, system, and apparatusFiled 2002·Granted May 4, 2004·44 cites·24 claims
- 0685US10366898B2Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)NANO MASTER INC·Filed 2018·Granted Jul 30, 2019·3 cites·8 claims
- 0785US10361088B2Techniques and systems for continuous-flow plasma enhanced atomic layer deposition (PEALD)NANO MASTER INC·Filed 2018·Granted Jul 23, 2019·3 cites·7 claims
- 0882US4496425ATechnique for determining the end point of an etching processAT & T TECHNOLOGIES INC·Filed 1984·Granted Jan 29, 1985·31 cites·14 claims
- 0977US4644576AMethod and apparatus for producing x-ray pulsesAT & T TECHNOLOGIES INC·Filed 1985·Granted Feb 17, 1987·35 cites·13 claims
- 1076US2025068054A1Mask and Reticle Protection with Atomic Layer Deposition (ALD)NANO MASTER INC·Filed 2024·Application pending·0 cites
- 1174US4537813APhotomask encapsulationAT & T TECHNOLOGIES INC·Filed 1983·Granted Aug 27, 1985·23 cites·4 claims
- 1270US12195850B2Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD)NANO MASTER INC·Filed 2022·Granted Jan 14, 2025·0 cites·10 claims
- 1368US12180586B2Apparatus and methods for roll-to-roll (R2R) plasma enhanced/activated atomic layer deposition (PEALD/PAALD)NANO MASTER INC·Filed 2021·Granted Dec 31, 2024·0 cites·8 claims
- 1461US12197125B2Mask and reticle protection with atomic layer deposition (ALD)NANO MASTER INC·Filed 2020·Granted Jan 14, 2025·0 cites·8 claims
- 1560US4499162APhotomask and method of using sameAT & T TECHNOLOGIES INC·Filed 1983·Granted Feb 12, 1985·15 cites·10 claims
- 1659US11640900B2Electron cyclotron rotation (ECR)-enhanced hollow cathode plasma source (HCPS)NANO MASTER INC·Filed 2021·Granted May 2, 2023·0 cites·20 claims
- 1747US4742233AMethod and apparatus for automated reading of vernier patternsAMERICAN TELEPHONE AND TELGRAP·Filed 1986·Granted May 3, 1988·16 cites·13 claims
- 1826US4635855AMethod and apparatus for rapidly controlling the flow of gasAT & T TECHNOLOGIES INC·Filed 1985·Granted Jan 13, 1987·5 cites·2 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →