Inventor · disambiguated record
Bodo Kuehn
Also filed as: KUEHN BODO
12 granted patents·2 pending applications·45 citations·filing 2004–2014
87Inventor score
Top patents by PatentIndex Score
14 records- 0188US9272942B2Method for producing synthetic quartz glass and quartz glass for use as cladding material of an optical fiberHERAEUS QUARZGLAS·Filed 2012·Granted Mar 1, 2016·11 cites·9 claims
- 0284US7981824B2Quartz glass blank and method for producing said blankHERAEUS QUARZGLAS·Filed 2005·Granted Jul 19, 2011·8 cites·13 claims
- 0382US7749930B2Holder made from quartz glass for the processing of semiconductor wafers and method for production of the holderHERAEUS QUARZGLAS·Filed 2006·Granted Jul 6, 2010·7 cites·17 claims
- 0476US7501367B2Optical component of quartz glass, method for producing said component, and method for exposing a substrateHERAEUS QUARZGLAS·Filed 2006·Granted Mar 10, 2009·5 cites·6 claims
- 0572US7637126B2Method for the production of laser-active quartz glass and use thereofHERAEUS QUARZGLAS·Filed 2004·Granted Dec 29, 2009·13 cites·18 claims
- 0665US9416040B2Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereofHERAEUS QUARZGLAS·Filed 2014·Granted Aug 16, 2016·1 cites·11 claims
- 0758US9834468B2Optical component made of quartz glass for use in ArF excimer laser lithography and method for producing the componentHERAEUS QUARZGLAS·Filed 2014·Granted Dec 5, 2017·0 cites·4 claims
- 0856US7691766B2Material, particularly for an optical component for use in microlithography, and method for making a blank from the materialHERAEUS QUARZGLAS·Filed 2007·Granted Apr 6, 2010·0 cites·15 claims
- 0952US7954341B2Method for making a blank from material, particularly for an optical component for use in microlithographyHERAEUS QUARZGLAS·Filed 2010·Granted Jun 7, 2011·0 cites·12 claims
- 1049US7707855B2Method for producing synthetic quartz glass with predetermined hydroxyl group contentHERAEUS QUARZGLAS·Filed 2007·Granted May 4, 2010·0 cites·20 claims
- 1149US2010091360A1Optical component made from synthetic quartz glass with enhanced radiation resistance, and method for producing the componentHERAEUS QUARZGLAS·Filed 2008·Application pending·0 cites
- 1246US7980098B2Method for producing an optical component of synthetic quartz glass with enhanced radiation resistance, and blank for producing the componentHERAEUS QUARZGLAS·Filed 2008·Granted Jul 19, 2011·0 cites·23 claims
- 1338US8931307B2Blank of titanium-doped glass with a high silica content for a mirror substrate for use in EUV lithography and method for the production thereofKUEHN BODO·Filed 2010·Granted Jan 13, 2015·0 cites·13 claims
- 1437US2007272685A1Quartz Glass Component For A Uv Radiation Source And Method For Producing And Testing The Aptitude Of Such A Quartz Glass ComponentSCHREIBER ANDREAS·Filed 2005·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →