Inventor · disambiguated record

Bofang Peng

Also filed as: PENG BOFANG

1 granted patent·5 citations·filing 2016–2016

26Inventor score

Technology areasG03F

Files withSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD1

Top patents by PatentIndex Score

1 record

0184US10268125B2Device and method for detecting overlay errorSHANGHAI MICRO ELECTRONICS EQUIPMENT GROUP CO LTD·Filed 2016·Granted Apr 23, 2019·5 cites·16 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →