Inventor · disambiguated record
Boon Meng Seah
Also filed as: SEAH BOON MENG
2 granted patents·1 pending application·36 citations·filing 2006–2012
62Inventor score
Technology areasH10P
Top patents by PatentIndex Score
3 records- 0190US8177993B2Apparatus and methods for cleaning and drying of wafersSEAH BOON MENG·Filed 2006·Granted May 15, 2012·28 cites·14 claims
- 0279US7601607B2Protruded contact and insertion of inter-layer-dielectric material to match damascene hardmask to improve undercut for low-k interconnectsCHARTERED SEMICONDUCTOR MFG·Filed 2006·Granted Oct 13, 2009·8 cites·28 claims
- 0344US2012255586A1Apparatus and methods for cleaning and drying of wafersSEAH BOON MENG·Filed 2012·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →