Inventor · disambiguated record
Bo Ram Chan Sung
Also filed as: SUNG BO RAM CHAN
5 granted patents·6 citations·filing 2007–2021
66Inventor score
Top patents by PatentIndex Score
5 records- 0171US7918910B2Unit for eliminating particles and apparatus for transferring a substrate having the sameSEMES CO LTD·Filed 2008·Granted Apr 5, 2011·5 cites·17 claims
- 0267US12416482B2Position measuring device and substrate processing apparatus including the sameSEMES CO LTD·Filed 2021·Granted Sep 16, 2025·0 cites·19 claims
- 0356US8256774B2Chucking member and spin head and method for chucking substrate using the chucking memberCHO JUNG KEUN·Filed 2007·Granted Sep 4, 2012·1 cites·11 claims
- 0438US8122899B2Apparatus and method for treating substrateKOO KYO-WOOG·Filed 2007·Granted Feb 28, 2012·0 cites·19 claims
- 0535US8402980B2Apparatus and method of generating ultrasonic vibration and apparatus and method of cleaning a wafer using the sameAHN YOUNG-KI·Filed 2008·Granted Mar 26, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →