Inventor · disambiguated record
Bu-Jin Ko
Also filed as: KO BU J · KO BU-JIN
6 granted patents·5 pending applications·79 citations·filing 2002–2010
84Inventor score
Files withJUSUNG ENG CO LTD8
Top patents by PatentIndex Score
11 records- 0186US7846292B2Gas injector and apparatus including the sameJUSUNG ENG CO LTD·Filed 2006·Granted Dec 7, 2010·13 cites·7 claims
- 0271US6847516B2Electrostatic chuck for preventing an arcJUSUNG ENG CO LTD·Filed 2002·Granted Jan 25, 2005·16 cites·13 claims
- 0369US6770836B2Impedance matching circuit for inductively coupled plasma sourceJUSUNG ENG CO LTD·Filed 2002·Granted Aug 3, 2004·25 cites·16 claims
- 0465US6917508B2Apparatus for manufacturing semiconductor deviceJUSUNG ENG CO LTD·Filed 2003·Granted Jul 12, 2005·11 cites·4 claims
- 0562US7156950B2Gas diffusion plate for use in ICP etcherJUSUNG ENG CO LTD·Filed 2003·Granted Jan 2, 2007·9 cites·11 claims
- 0645US2011024527A1Gas injector and apparatus including the sameJUSUNG ENG CO LTD·Filed 2010·Application pending·0 cites
- 0744US6653988B2Parallel resonance whirl antennaJUSUNG ENG CO LTD·Filed 2002·Granted Nov 25, 2003·5 cites·8 claims
- 0837US2005129489A1Load lock and load lock chamber using the sameFiled 2004·Application pending·0 cites
- 0934US2003066605A1Air exhaust system of a chamber for manufacturing semiconductor deviceFiled 2002·Application pending·0 cites
- 1034US2002189763A1Plasma processing apparatus having parallel resonance antenna for very high frequencyJUSUNG ENG CO LTD·Filed 2002·Application pending·0 cites
- 1134US2004005730A1Controller module for a semiconductor manufacturing deviceFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →