Inventor · disambiguated record
Burkhard Lischke
Also filed as: LISCHKE BURKHARD
27 granted patents·905 citations·filing 1976–1989
97Inventor score
Files withSIEMENS AG27
Top patents by PatentIndex Score
27 records- 0198US4899060ADiaphragm system for generating a plurality of particle probes haivng variable cross sectionSIEMENS AG·Filed 1989·Granted Feb 6, 1990·160 cites·4 claims
- 0297US4724328ALithographic apparatus for the production of microstructuresSIEMENS AG·Filed 1986·Granted Feb 9, 1988·119 cites·16 claims
- 0395US4994336AMethod for manufacturing a control plate for a lithographic deviceSIEMENS AG·Filed 1989·Granted Feb 19, 1991·84 cites·6 claims
- 0490US4786149AArrangement for optical image processingSIEMENS AG·Filed 1987·Granted Nov 22, 1988·73 cites·4 claims
- 0589US4982099AAperture diaphragm for a lithography apparatusSIEMENS AG·Filed 1986·Granted Jan 1, 1991·42 cites·5 claims
- 0689US4140913ACharged-particle beam optical apparatus for the reduction imaging of a mask on a specimenSIEMENS AG·Filed 1978·Granted Feb 20, 1979·32 cites·13 claims
- 0788US4985681AParticle beam measuring method for non-contact testing of interconnect networksSIEMENS AG·Filed 1985·Granted Jan 15, 1991·55 cites·16 claims
- 0888US4514638AElectron-optical system with variable-shaped beam for generating and measuring microstructuresSIEMENS AG·Filed 1984·Granted Apr 30, 1985·31 cites·17 claims
- 0987US4954705AMethod for examining a specimen in a particle beam instrumentSIEMENS AG·Filed 1989·Granted Sep 4, 1990·35 cites·13 claims
- 1087US4714833AArrangement for detecting secondary and/or backscatter electrons in an electron beam apparatusSIEMENS AG·Filed 1986·Granted Dec 22, 1987·37 cites·14 claims
- 1185US4573008AMethod for the contact-free testing of microcircuits or the like with a particle beam probeSIEMENS AG·Filed 1983·Granted Feb 25, 1986·39 cites·4 claims
- 1285US4540885ASpectrometer objective having parallel objective fields and spectrometer fields for the potential measuring techniqueSIEMENS AG·Filed 1983·Granted Sep 10, 1985·28 cites·11 claims
- 1382US4551625ASpectrometer objective for particle beam measurement techniqueSIEMENS AG·Filed 1983·Granted Nov 5, 1985·22 cites·10 claims
- 1476US4164658ACharged-particle beam optical apparatus for imaging a mask on a specimenSIEMENS AG·Filed 1978·Granted Aug 14, 1979·16 cites·2 claims
- 1575US5049460AMethod for producing beam-shaping diaphragms for lithographic devicesSIEMENS AG·Filed 1989·Granted Sep 17, 1991·20 cites·6 claims
- 1669US4587481AArrangement for testing micro interconnections and a method for operating the sameSIEMENS AG·Filed 1983·Granted May 6, 1986·21 cites·12 claims
- 1767US4136285AMethod for irradiating a specimen by corpuscular-beam radiationSIEMENS AG·Filed 1976·Granted Jan 23, 1979·12 cites·1 claims
- 1862US4677296AApparatus and method for measuring lengths in a scanning particle microscopeSIEMENS AG·Filed 1985·Granted Jun 30, 1987·18 cites·16 claims
- 1960US4393308AHigh current electron sourceSIEMENS AG·Filed 1981·Granted Jul 12, 1983·10 cites·6 claims
- 2052US4246487AMethod and device for determining the focal length of a long focal length electron optical lensSIEMENS AG·Filed 1979·Granted Jan 20, 1981·6 cites·10 claims
- 2152US4238680AMethod and device for setting and correcting errors of an electron optical condenser of a microprojectorSIEMENS AG·Filed 1979·Granted Dec 9, 1980·6 cites·7 claims
- 2249US4924136ABeam generating system for electron beam measuring instruments having cathode support structureSIEMENS AG·Filed 1988·Granted May 8, 1990·6 cites·9 claims
- 2349US4168434ALong focal length magnetic lens for the optical imaging of a specimen having a large surface areaSIEMENS AG·Filed 1978·Granted Sep 18, 1979·6 cites·6 claims
- 2446US4628258AMethod and apparatus for electrical testing of microwired structures with the assistance of particle probesSIEMENS AG·Filed 1985·Granted Dec 9, 1986·9 cites·14 claims
- 2545US4601971ATunnel cathode mask for electron lithography and method for manufacturing and operating itSIEMENS AG·Filed 1983·Granted Jul 22, 1986·4 cites·12 claims
- 2644US5128207AMethod for producing uniform polymethylmethacrylate layersSIEMENS AG·Filed 1989·Granted Jul 7, 1992·8 cites·19 claims
- 2739US4623836ASampling method for fast potential determination in electron beam mensurationSIEMENS AG·Filed 1985·Granted Nov 18, 1986·6 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →