Inventor · disambiguated record
Byeung-Wook Choi
Also filed as: CHOI BYEUNG-WOOK
3 granted patents·3 pending applications·117 citations·filing 1998–2014
73Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
6 records- 0183US6623597B1Focus ring and apparatus for processing a semiconductor wafer comprising the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 23, 2003·53 cites·12 claims
- 0279US6236903B1Multiple reaction chamber system having wafer recognition system and method for processing wafer using sameSAMSUNG ELECTRONICS CO LTD·Filed 1998·Granted May 22, 2001·62 cites·22 claims
- 0347US6835276B2Window for allowing end point of etching process to be detected and etching device comprising the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Dec 28, 2004·2 cites·7 claims
- 0438US2015107770A1Side storage unit for removing fumes and manufacturing apparatus for semionductor devices having the sameSAMSUNG ELECTRONICS CO LTD·Filed 2014·Application pending·0 cites
- 0533US2002088545A1Gas injector comprising block of ceramic material having gas injection holes extending therethrough, and etching apparatus incorporating the sameFiled 2001·Application pending·0 cites
- 0633US2003008419A1Induction magnet for use in producing high-density plasma and method of manufacturing the same, and semiconductor manufacturing equipment comprising the induction magnetFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →