Inventor · disambiguated record
Byeongsang Kim
Also filed as: KIM BYEONGSANG
6 granted patents·8 pending applications·3 citations·filing 2015–2025
67Inventor score
Files withSAMSUNG ELECTRONICS CO LTD14
Top patents by PatentIndex Score
14 records- 0174US9381653B2Robot and substrate handling apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2015·Granted Jul 5, 2016·3 cites·18 claims
- 0266US2025146917A1Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing waferSAMSUNG ELECTRONICS CO LTD·Filed 2025·Application pending·0 cites
- 0362US12222362B2Method of measuring parameters of plasma, apparatus for measuring parameters of plasma, plasma processing system, and method of processing waferSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Feb 11, 2025·0 cites·17 claims
- 0457US12210045B2Impedance measurement jig and method of controlling a substrate-processing apparatus using the jigSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Jan 28, 2025·0 cites·16 claims
- 0554US2023317418A1Substrate processing apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0652US2024167162A1Substrate stage and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0750US2023078095A1Plasma etching apparatus and semiconductor processing systemSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0850US2023187236A1Wafer baking apparatusSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 0949US2023100582A1Substrate processing apparatus including plurality of electrodesSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1049US2023187178A1Gas supply module and substrate processing apparatus using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Application pending·0 cites
- 1142US11404252B2Electrostatic chuck and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Aug 2, 2022·0 cites·11 claims
- 1241US11984344B2Lift apparatus and substrate processing apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted May 14, 2024·0 cites·20 claims
- 1337US11538701B2Method of inspecting a semiconductor processing chamber using a vision sensor, and method for manufacturing a semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Dec 27, 2022·0 cites·22 claims
- 1436US2019361340A1Semiconductor imprint device and operating method of semiconductor imprint deviceSAMSUNG ELECTRONICS CO LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →