Inventor · disambiguated record
Byeong Chan Kim
Also filed as: KIM BYEONG CHAN
4 granted patents·89 citations·filing 1995–1998
78Inventor score
Top patents by PatentIndex Score
4 records- 0168US5840167ASputtering deposition apparatus and method utilizing charged particlesLG SEMICON CO LTD·Filed 1995·Granted Nov 24, 1998·44 cites·13 claims
- 0263US6242164B1Method for patterning chemical amplified photoresistHYUNDAI ELECTRONICS IND·Filed 1998·Granted Jun 5, 2001·31 cites·16 claims
- 0337US6168907B1Method for etching semiconductor deviceHYUNDAI ELECTRONICS IND·Filed 1998·Granted Jan 2, 2001·7 cites·14 claims
- 0435US5882824APhase-shifting mask and method for manufacturing the sameLG SEMICON CO LTD·Filed 1997·Granted Mar 16, 1999·7 cites·11 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →