Inventor · disambiguated record
Byeong Hyeon Kong
Also filed as: KONG BYEONG HYEON
1 granted patent·2 pending applications·0 citations·filing 2019–2024
7Inventor score
Files withSEMES CO LTD3
Top patents by PatentIndex Score
3 records- 0143US2025201615A1Heater circuit, controlling method thereof, and substrate processing apparatusSEMES CO LTD·Filed 2024·Application pending·0 cites
- 0241US10957517B2Substrate treating apparatus and temperature control method for gas distribution plateSEMES CO LTD·Filed 2019·Granted Mar 23, 2021·0 cites·9 claims
- 0338US2024055241A1Esc temperature control unit and substrate treating apparatus including the sameSEMES CO LTD·Filed 2023·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →