Inventor · disambiguated record
Byung Gwan Lim
Also filed as: LIM BYUNG GWAN
2 granted patents·3 pending applications·0 citations·filing 2019–2022
27Inventor score
Files withJUSUNG ENG CO LTD5
Top patents by PatentIndex Score
5 records- 0172US11427906B2Chamber cleaning device and chamber cleaning methodJUSUNG ENG CO LTD·Filed 2019·Granted Aug 30, 2022·0 cites·9 claims
- 0270US12065734B2Chamber cleaning device and chamber cleaning methodJUSUNG ENG CO LTD·Filed 2022·Granted Aug 20, 2024·0 cites·6 claims
- 0357US2024263307A1Thin film deposition methodJUSUNG ENG CO LTD·Filed 2022·Application pending·0 cites
- 0457US2024318309A1Method for controlling canister temperature and raw material supply deviceJUSUNG ENG CO LTD·Filed 2022·Application pending·0 cites
- 0552US2024371614A1Method for washing substrate treatment apparatusJUSUNG ENG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →