Inventor · disambiguated record
Byoung-Gyu Song
Also filed as: SONG BYOUNG-GYU
14 granted patents·15 pending applications·59 citations·filing 2008–2017
90Inventor score
Top patents by PatentIndex Score
29 records- 0191US10337103B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Jul 2, 2019·5 cites·5 claims
- 0290US10161036B2Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Dec 25, 2018·4 cites·9 claims
- 0387US9620395B2Apparatus for processing substrate for supplying reaction gas having phase differenceEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 11, 2017·9 cites·11 claims
- 0484US9593415B2Substrate processing apparatus including auxiliary gas supply portEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·7 cites·10 claims
- 0582US9875895B2Substrate processing apparatus including exhaust ports and substrate processing methodEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 23, 2018·5 cites·3 claims
- 0681US8771417B2Exhaust unit, exhaust method using the exhaust unit, and substrate processing apparatus including the exhaust unitYOON SONG KEUN·Filed 2008·Granted Jul 8, 2014·16 cites·13 claims
- 0778US9368380B2Substrate processing device with connection spaceEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Jun 14, 2016·4 cites·8 claims
- 0876US10229845B2Substrate treatment apparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Granted Mar 12, 2019·4 cites·12 claims
- 0976US9593418B2Showerhead having cooling system and substrate processing apparatus including the showerheadEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Mar 14, 2017·1 cites·10 claims
- 1072US9869019B2Substrate processing apparatus including processing unitEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Jan 16, 2018·3 cites·13 claims
- 1161US9953850B2Substrate processing apparatus including heat-shield plateEUGENE TECHNOLOGY CO LTD·Filed 2012·Granted Apr 24, 2018·1 cites·4 claims
- 1255US2015176128A1Substrate Processing ApparatusEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 1352US2014331933A1Apparatus for processing apparatus having side pumping typeEUGENE TECHNOLOGY CO LTD·Filed 2012·Application pending·0 cites
- 1449US10593545B2Method for substrate processing using exhaust portsEUGENE TECHNOLOGY CO LTD·Filed 2017·Granted Mar 17, 2020·0 cites·3 claims
- 1548US2010196625A1Showerhead, substrate processing apparatus including the showerhead, and plasma supplying method using the showerheadEUGENE TECHNOLOGY CO LTD·Filed 2008·Application pending·0 cites
- 1643US9644895B2Heater moving type substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2013·Granted May 9, 2017·0 cites·11 claims
- 1743US2010175622A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2008·Application pending·0 cites
- 1843US2015179489A1Substrate Processing Module, Substrate Processing Apparatus Including the same, and Substrate Transferring MethodEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 1943US2015380284A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2043US2015369539A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2142US2015252476A1Substrate processing apparatusEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2242US2015337460A1Substrate-processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2014·Application pending·0 cites
- 2342US2015267291A1Purge chamber, and substrate-processing apparatus including sameEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2441US2015191821A1Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2541US2015211116A1Substrate processing deviceEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2641US2015136026A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2741US2015122177A1Apparatus for processing substrateEUGENE TECHNOLOGY CO LTD·Filed 2013·Application pending·0 cites
- 2835US10793949B2Substrate processing apparatus and substrate processing method using the sameEUGENE TECHNOLOGY CO LTD·Filed 2016·Granted Oct 6, 2020·0 cites·9 claims
- 2931US2015228520A1Substrate Transfer Robot and Substrate Processing Apparatus Using The SameEUGENE TECHNOLOGY CO LTD·Filed 2015·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →