Inventor · disambiguated record

C. Randall Harwood

Also filed as: HARWOOD C RANDALL

2 granted patents·376 citations·filing 1996–1997

73Inventor score

Technology areasH10P

Files withINTEGRATED PROCESS EQUIPMENT C2

Top patents by PatentIndex Score

2 records

0195US5664990ASlurry recycling in CMP apparatusINTEGRATED PROCESS EQUIPMENT C·Filed 1996·Granted Sep 9, 1997·233 cites·28 claims
0293US5755614ARinse water recycling in CMP apparatusINTEGRATED PROCESS EQUIPMENT C·Filed 1997·Granted May 26, 1998·143 cites·3 claims

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