Inventor · disambiguated record
C. H. Yu
Also filed as: YU C H
4 granted patents·304 citations·filing 1997–1997
83Inventor score
Files withTAIWAN SEMICONDUCTOR MFG4
Top patents by PatentIndex Score
4 records- 0181US5786262ASelf-planarized gapfilling for shallow trench isolationTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 28, 1998·90 cites·20 claims
- 0280US5807789AMethod for forming a shallow trench with tapered profile and round corners for the application of shallow trench isolation (STI)TAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Sep 15, 1998·82 cites·28 claims
- 0378US5858879AMethod for etching metal lines with enhanced profile controlTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jan 12, 1999·83 cites·20 claims
- 0471US5926722APlanarization of shallow trench isolation by differential etchback and chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG·Filed 1997·Granted Jul 20, 1999·49 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →