Inventor · disambiguated record
Catherine Vartuli
Also filed as: VARTULI CATHERINE · VARTULI CATHERINE B · VARTULI CATHERINE BETH
18 granted patents·2 pending applications·165 citations·filing 1998–2011
94Inventor score
Top patents by PatentIndex Score
20 records- 0181US8853805B2Strain measurement test moduleCHUNG JAYHOON·Filed 2011·Granted Oct 7, 2014·10 cites·18 claims
- 0280US6569690B1Monitoring system for determining progress in a fabrication activityAGERE SYST GUARDIAN CORP·Filed 2000·Granted May 27, 2003·21 cites·9 claims
- 0374US6225639B1Method of monitoring a patterned transfer process using line width metrologyAGERE SYST GUARDIAN CORP·Filed 1999·Granted May 1, 2001·49 cites·21 claims
- 0470US6606371B2X-ray systemAGERE SYSTEMS INC·Filed 2000·Granted Aug 12, 2003·11 cites·10 claims
- 0569US6750447B2Calibration standard for high resolution electron microscopyAGERE SYSTEMS INC·Filed 2002·Granted Jun 15, 2004·8 cites·12 claims
- 0666US6519543B1Calibration method for quantitative elemental analysisAGERE SYSTEMS INC·Filed 2000·Granted Feb 11, 2003·11 cites·22 claims
- 0765US6603119B1Calibration method for quantitative elemental analysisAGERE SYSTEMS INC·Filed 2000·Granted Aug 5, 2003·6 cites·23 claims
- 0864US6577970B2Method of determining a crystallographic quality of a material located on a substrateAGERE SYSTEMS INC·Filed 2001·Granted Jun 10, 2003·5 cites·20 claims
- 0962US6870950B2Method for detecting defects in a material and a system for accomplishing the sameAGERE SYSTEMS INC·Filed 2001·Granted Mar 22, 2005·7 cites·25 claims
- 1054US6246060B1Apparatus for holding and aligning a scanning electron microscope sampleAGERE SYST GUARDIAN CORP·Filed 1998·Granted Jun 12, 2001·13 cites·12 claims
- 1150US6695572B2Method and apparatus for minimizing semiconductor wafer contaminationAGERE SYSTEMS INC·Filed 2001·Granted Feb 24, 2004·4 cites·1 claims
- 1250US6633032B2Mass spectrometer particle counterAGERE SYSTEMS INC·Filed 2000·Granted Oct 14, 2003·2 cites·21 claims
- 1350US6362475B1Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced therebyAGERE SYST GUARDIAN CORP·Filed 1999·Granted Mar 26, 2002·14 cites·20 claims
- 1440US6713409B2Semiconductor manufacturing using modular substratesAGERE SYSTEMS INC·Filed 2002·Granted Mar 30, 2004·0 cites·14 claims
- 1539US6534851B1Modular semiconductor substratesAGERE SYSTEMS INC·Filed 2000·Granted Mar 18, 2003·0 cites·27 claims
- 1638US6708574B2Abnormal photoresist line/space profile detection through signal processing of metrology waveformAGERE SYSTEMS INC·Filed 2002·Granted Mar 23, 2004·0 cites·11 claims
- 1738US6627885B1Method of focused ion beam pattern transfer using a smart dynamic templateAGERE SYSTEMS INC·Filed 2000·Granted Sep 30, 2003·0 cites·11 claims
- 1836US2002150509A1Laboratory specimen sampler with integrated specimen mountFiled 2001·Application pending·0 cites
- 1935US6265235B1Method of sectioning of photoresist for shape evaluationLUCENT TECHNOLOGIES INC·Filed 1999·Granted Jul 24, 2001·4 cites·21 claims
- 2029US2004229477A1Apparatus and method for producing a <111> orientation aluminum film for an integrated circuit deviceFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →