Inventor · disambiguated record
Christian Buergel
Also filed as: BUERGEL CHRISTIAN
3 granted patents·32 citations·filing 2009–2015
66Inventor score
Top patents by PatentIndex Score
3 records- 0194US9500945B1Pattern classification based proximity corrections for reticle fabricationGLOBALFOUNDRIES SG PTE LTD·Filed 2015·Granted Nov 22, 2016·9 cites·20 claims
- 0285US8257888B2Particle beam writing method, particle beam writing apparatus and maintenance method for sameSCZYRBA MARTIN·Filed 2009·Granted Sep 4, 2012·23 cites·16 claims
- 0339US9405185B2Shape metrology for photomasksADVANCED MASK TECH CENTER GMBH & CO KG·Filed 2014·Granted Aug 2, 2016·0 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →