Inventor · disambiguated record
Chih-Kuo Chang
Also filed as: CHANG CHIH-KUO
8 granted patents·2 pending applications·18 citations·filing 2013–2024
80Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD10
Top patents by PatentIndex Score
10 records- 0195US10170287B1Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 1, 2019·15 cites·20 claims
- 0275US2024363318A1Arcing protection method, processing tool and fabrication systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0374US12057301B2Arcing protection method, processing tool and fabrication systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 6, 2024·0 cites·20 claims
- 0474US2025125176A1Portable robotic semiconductor pod loaderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0570US11664206B2Arcing protection method and processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 30, 2023·1 cites·20 claims
- 0667US10734206B2Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 4, 2020·0 cites·20 claims
- 0766US12217991B2Portable robotic semiconductor pod loaderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 4, 2025·0 cites·20 claims
- 0866US9741600B2Semiconductor apparatus with transportable edge ring for substrate transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Aug 22, 2017·1 cites·18 claims
- 0963US10559453B2Techniques for detecting micro-arcing occurring inside a semiconductor processing chamberTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Feb 11, 2020·0 cites·20 claims
- 1062US9425077B2Semiconductor apparatus with transportable edge ring for substrate transportTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 23, 2016·1 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →