Inventor · disambiguated record
Chan-Sam Chang
Also filed as: CHANG CHAN-SAM
4 granted patents·3 citations·filing 2013–2020
61Inventor score
Files withSAMSUNG ELECTRONICS CO LTD4
Top patents by PatentIndex Score
4 records- 0180US10809624B2Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure methodSAMSUNG ELECTRONICS CO LTD·Filed 2019·Granted Oct 20, 2020·2 cites·20 claims
- 0269US10451983B2Exposure apparatus and method of fabricating semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2018·Granted Oct 22, 2019·1 cites·20 claims
- 0354US10969691B2Extreme ultraviolet exposure apparatus and method, and method of manufacturing semiconductor device by using the exposure methodSAMSUNG ELECTRONICS CO LTD·Filed 2020·Granted Apr 6, 2021·0 cites·8 claims
- 0445US9034742B2Method for fabricating semiconductor deviceSAMSUNG ELECTRONICS CO LTD·Filed 2013·Granted May 19, 2015·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →