Inventor · disambiguated record
Chih-Wing Chang
Also filed as: CHANG CHIH-WING
5 granted patents·2 pending applications·24 citations·filing 2003–2014
74Inventor score
Top patents by PatentIndex Score
7 records- 0168US8925290B2Mask storage device for mask haze prevention and methods thereofCHANG YUNG-CHIH·Filed 2011·Granted Jan 6, 2015·4 cites·19 claims
- 0267US6727029B1Method for making reticles with reduced particle contamination and reticles formedTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 27, 2004·12 cites·18 claims
- 0362US7635652B2Mask with hydrophobic surfaceTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Dec 22, 2009·8 cites·11 claims
- 0451US9527649B2Mask storage device for mask haze preventionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Dec 27, 2016·0 cites·20 claims
- 0541US2007227565A1Workstation and cleaning apparatus thereofTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0641US2008060974A1Mask carrier treatment to prevent haze and ESD damageTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 0739US8142959B2Method and apparatus for gating photomask contaminationCHANG CHIH-WING·Filed 2008·Granted Mar 27, 2012·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →