Inventor · disambiguated record
Chia-Hsun Chang
Also filed as: CHANG CHIA-HSUN
4 granted patents·1 pending application·0 citations·filing 2019–2025
56Inventor score
Technology areasH10P
Files withTAIWAN SEMICONDUCTOR MFG CO LTD5
Top patents by PatentIndex Score
5 records- 0183US2025360544A1Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0270US12472538B2Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 18, 2025·0 cites·20 claims
- 0360US11517995B2Wet chemical heating system and a method of chemical mechanical polishingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 6, 2022·0 cites·20 claims
- 0458US11318506B2Apparatus for cleaning semiconductor equipmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 3, 2022·0 cites·20 claims
- 0545US10868241B2Apparatus for polarizing a semiconductor wafer and method for fabricating a magnetic semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 15, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →