Inventor · disambiguated record
Chao-Jung Chang
Also filed as: CHANG CHAO-JUNG
4 granted patents·2 pending applications·21 citations·filing 2002–2004
69Inventor score
Files withTAIWAN SEMICONDUCTOR MFG5
Top patents by PatentIndex Score
6 records- 0164US6926584B2Dual mode hybrid control and method for CMP slurryTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Aug 9, 2005·12 cites·15 claims
- 0261US6860723B2Slurry flow control and monitor system for chemical mechanical polisherTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Mar 1, 2005·9 cites·10 claims
- 0340US6884149B2Method and system for in-situ monitoring of mixing ratio of high selectivity slurryTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted Apr 26, 2005·0 cites·8 claims
- 0438US6729935B2Method and system for in-situ monitoring of mixing ratio of high selectivity slurryTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted May 4, 2004·0 cites·18 claims
- 0534US2005202763A1Multi-function slurry delivery systemFiled 2004·Application pending·0 cites
- 0633US2003211743A1Method for avoiding slurry sedimentation in CMP slurry delivery systemsTAIWAN SEMICONDUCTOR MFG·Filed 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →