Inventor · disambiguated record
Chung-Tai Chen
Also filed as: CHEN CHUNG-TAI
6 granted patents·1 pending application·52 citations·filing 2001–2005
81Inventor score
Files withMACRONIX INT CO LTD6
Top patents by PatentIndex Score
7 records- 0173US6627001B2Method for cleaning a semiconductor waferMACRONIX INT CO LTD·Filed 2001·Granted Sep 30, 2003·19 cites·27 claims
- 0265US6417095B1Method for fabricating a dual damascene structureMACRONIX INT CO LTD·Filed 2001·Granted Jul 9, 2002·15 cites·19 claims
- 0363US6524965B2Cleaning method for semiconductor manufacturing process to prevent metal corrosionMACRONIX INT CO LTD·Filed 2001·Granted Feb 25, 2003·10 cites·16 claims
- 0459US7723229B2Process of forming a self-aligned contact in a semiconductor deviceMACRONIX INT CO LTD·Filed 2005·Granted May 25, 2010·2 cites·28 claims
- 0555US6579812B2Method for removing residual polymer after the dry etching process and reducing oxide lossMACRONIX INT CO LTD·Filed 2001·Granted Jun 17, 2003·6 cites·7 claims
- 0646US6746970B2Method of forming a fluorocarbon polymer film on a substrate using a passivation layerMACRONIX INT CO LTD·Filed 2002·Granted Jun 8, 2004·0 cites·17 claims
- 0732US2002174879A1Method for cleaning a semiconductor waferFiled 2002·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →