Inventor · disambiguated record
Che-Fu Chen
Also filed as: CHEN CHE-FU
32 granted patents·6 pending applications·37 citations·filing 2018–2025
94Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD38
Top patents by PatentIndex Score
38 records- 0197US11443966B2Semiconductor processing flow field control apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 13, 2022·7 cites·20 claims
- 0294US12027594B2Method of manufacturing a semiconductor device and a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jul 2, 2024·4 cites·20 claims
- 0388US10283393B1Wafer carrying fork, semiconductor device manufacturing system, and wafer transporting methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 7, 2019·5 cites·20 claims
- 0485US11756840B2Reflectance measurement system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 12, 2023·4 cites·20 claims
- 0585US11177183B2Thickness measurement system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 16, 2021·4 cites·20 claims
- 0683US12482682B2Systems and methods for inspection stationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Nov 25, 2025·0 cites·20 claims
- 0783US11101163B2Systems and methods for automated robotic arm sensingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 24, 2021·3 cites·20 claims
- 0883US11004713B2Robot arm device and method for transferring waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 11, 2021·3 cites·20 claims
- 0982US2025331264A1Semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1081US12414347B2Method of manufacturing a semiconductor device and a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Sep 9, 2025·0 cites·20 claims
- 1180US2025357218A1Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 1278US12154813B2Electrostatic chuck sidewall gas curtainTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 26, 2024·0 cites·20 claims
- 1378US11211232B2Methods for cleaning semiconductor device manufacturing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 28, 2021·2 cites·20 claims
- 1477US11177150B2Cluster tool and method using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Nov 16, 2021·2 cites·20 claims
- 1577US2024387228A1Electrostatic Chuck Sidewall Gas CurtainTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1676US12090503B2Semiconductor process chamber contamination prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 17, 2024·0 cites·20 claims
- 1776US11600517B2Screwless semiconductor processing chambersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 7, 2023·2 cites·20 claims
- 1874US10978333B2Systems and methods for robotic arm sensingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 13, 2021·1 cites·20 claims
- 1973US12068398B2Fin field-effect transistor with void and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 20, 2024·0 cites·20 claims
- 2073US2024371980A1Fin Field-Effect Transistor With Void and Method of Forming The SameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2172US12444657B2Wafer processing methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 14, 2025·0 cites·20 claims
- 2272US2025069944A1Screwless semiconductor processing chambersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2371US12165909B2Screwless semiconductor processing chambersTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 10, 2024·0 cites·20 claims
- 2469US11664265B2Systems and methods for robotic arm sensingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 30, 2023·0 cites·20 claims
- 2568US11664260B2Systems and methods for orientator based wafer defect sensingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 30, 2023·0 cites·20 claims
- 2667US2022367237A1Wafer release mechanismTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2766US12040205B2Systems and methods for inspection stationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 16, 2024·0 cites·20 claims
- 2866US11837484B2Robot arm device and method for transferring waferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 5, 2023·0 cites·20 claims
- 2965US11779949B2Semiconductor process chamber contamination prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Oct 10, 2023·0 cites·20 claims
- 3062US11521884B2Electrostatic chuck sidewall gas curtainTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 6, 2022·0 cites·16 claims
- 3161US11710620B2Semiconductor process chamber with heat pipeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 25, 2023·0 cites·20 claims
- 3260US11456203B2Wafer release mechanismTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 27, 2022·0 cites·20 claims
- 3359US11139149B2Gas injectorTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 5, 2021·0 cites·18 claims
- 3458US10811290B2Systems and methods for inspection stationsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 20, 2020·0 cites·20 claims
- 3555US12420314B2Semiconductor cleaning apparatus and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 23, 2025·0 cites·20 claims
- 3654US11664444B2Fin field-effect transistor with void and method of forming the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted May 30, 2023·0 cites·20 claims
- 3754US11031264B2Semiconductor device manufacturing systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jun 8, 2021·0 cites·20 claims
- 3854US10978331B2Systems and methods for orientator based wafer defect sensingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 13, 2021·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →