Inventor · disambiguated record
Chung-Hsiu Cheng
Also filed as: CHENG CHUNG PIN · CHENG CHUNG-HSIU
4 granted patents·4 pending applications·4 citations·filing 2001–2024
61Inventor score
Top patents by PatentIndex Score
8 records- 0168US2024363312A1Methods and systems for cooling plasma treatment componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0268US2023386799A1Focus ring for a plasma-based semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 0365US12062523B2Methods and systems for cooling plasma treatment componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 13, 2024·0 cites·20 claims
- 0458US2023066418A1Focus ring for a plasma-based semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 0550US8673788B2Method of forming a layer on a semiconductor substrate having a plurality of trenchesCHENG CHUNG-HSIU·Filed 2010·Granted Mar 18, 2014·1 cites·16 claims
- 0646US6833233B2Deep UV-resistant photoresist plug for via holeTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Dec 21, 2004·3 cites·8 claims
- 0732US2003024687A1Radiation fin set for heat sinkFiled 2001·Application pending·0 cites
- 0829US10867816B2Method and apparatus for wafer backside coolingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 15, 2020·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →