Inventor · disambiguated record
Chun-Li Chou
Also filed as: CHOU CHUN-LI
20 granted patents·3 pending applications·74 citations·filing 2002–2024
92Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD12TAIWAN SEMICONDUCTOR MFG7CHOU CHUN-LI2CHEN HUANG-MING1STAR TRACKING MAT CO LTD1
Top patents by PatentIndex Score
23 records- 0192US7968506B2Wet cleaning stripping of etch residue after trench and via opening formation in dual damascene processTAIWAN SEMICONDUCTOR MFG·Filed 2008·Granted Jun 28, 2011·20 cites·3 claims
- 0280US12112953B2Semiconductor devices and methods of manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Oct 8, 2024·0 cites·20 claims
- 0380US2024395559A1Semiconductor devices and methods of manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0478US7713380B2Method and apparatus for backside polymer reduction in dry-etch processTAIWAN SEMICONDUCTOR MFG·Filed 2004·Granted May 11, 2010·18 cites·11 claims
- 0575US11923199B2Method and structure of middle layer removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
- 0672US7022610B2Wet cleaning method to eliminate copper corrosionTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Apr 4, 2006·14 cites·21 claims
- 0771US11776818B2Semiconductor devices and methods of manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Oct 3, 2023·0 cites·20 claims
- 0867US11398380B2Method and structure of middle layer removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 26, 2022·0 cites·20 claims
- 0967US9728533B2Aqueous cleaning techniques and compositions for use in semiconductor device manufactureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Aug 8, 2017·1 cites·20 claims
- 1067US9117760B2Method and system for energized and pressurized liquids for cleaning/etching applications in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Aug 25, 2015·2 cites·16 claims
- 1167US8916429B2Aqueous cleaning techniques and compositions for use in semiconductor device manufacturingCHOU CHUN-LI·Filed 2012·Granted Dec 23, 2014·2 cites·14 claims
- 1265US6864193B2Aqueous cleaning composition containing copper-specific corrosion inhibitorTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted Mar 8, 2005·9 cites·8 claims
- 1363US10985028B1Semiconductor devices and methods of manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 20, 2021·0 cites·20 claims
- 1460US10658179B2Method and structure of middle layer removalTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted May 19, 2020·0 cites·20 claims
- 1559US2024209290A1Semiconductor Wafer Cleaning Solution and Cleaning Method ThereofSTAR TRACKING MAT CO LTD·Filed 2023·Application pending·0 cites
- 1654US7373941B2Wet cleaning cavitation system and method to remove particulate wafer contaminationTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted May 20, 2008·4 cites·17 claims
- 1753US2007254476A1Cleaning porous low-k material in the formation of an interconnect structureTAIWAN SEMICONDUCTOR MFG·Filed 2006·Application pending·0 cites
- 1848US6974505B2Tool for cleaning substratesTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Dec 13, 2005·4 cites·14 claims
- 1944US9048089B2Apparatus to improve internal wafer temperature profileTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jun 2, 2015·0 cites·20 claims
- 2043US8529783B2Method for backside polymer reduction in dry-etch processCHEN HUANG-MING·Filed 2010·Granted Sep 10, 2013·0 cites·19 claims
- 2140US10755972B2Semiconductor device and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Aug 25, 2020·0 cites·20 claims
- 2238US10354913B2Chemical clean of semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jul 16, 2019·0 cites·20 claims
- 2333US9263337B2Semiconductor device and method of manufactureCHOU CHUN-LI·Filed 2012·Granted Feb 16, 2016·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →