Inventor · disambiguated record

Chu-Yan Fu

Also filed as: FU CHU-YAN

1 granted patent·67 citations·filing 1999–1999

50Inventor score

Technology areasH10P

Files withTAIWAN SEMICONDUCTOR MFG1

Top patents by PatentIndex Score

1 record

0179US6297162B1Method to reduce silicon oxynitride etch rate in a silicon oxide dry etchTAIWAN SEMICONDUCTOR MFG·Filed 1999·Granted Oct 2, 2001·67 cites·6 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →