Inventor · disambiguated record
Chien-Chung Fu
Also filed as: FU CHIEN-CHUNG
12 granted patents·8 pending applications·95 citations·filing 1999–2017
89Inventor score
Files withFU CHIEN-CHUNG4NAT UNIV TSING HUA4TAIWAN SEMICONDUCTOR MFG4IND TECH RES INST2UNIV TSINGHUA2
Top patents by PatentIndex Score
20 records- 0188US7947430B2Method of forming 3D micro structures with high aspect ratiosNAT UNIV TSING HUA·Filed 2008·Granted May 24, 2011·12 cites·9 claims
- 0278US7217663B2Via hole and trench structures and fabrication methods thereof and dual damascene structures and fabrication methods thereofTAIWAN SEMICONDUCTOR MFG·Filed 2005·Granted May 15, 2007·7 cites·14 claims
- 0378US6809028B2Chemistry for liner removal in a dual damascene processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 26, 2004·22 cites·7 claims
- 0476US8400616B2Laser interference lithography apparatus capable of stitching small exposed areas into large exposed areaFU CHIEN-CHUNG·Filed 2010·Granted Mar 19, 2013·4 cites·7 claims
- 0575US6289746B1Thermal pulsed micro flow sensorIND TECH RES INST·Filed 1999·Granted Sep 18, 2001·41 cites·9 claims
- 0673US7384729B2Method of manufacturing a LIGA mold by backside exposureUNIV TSINGHUA·Filed 2006·Granted Jun 10, 2008·4 cites·9 claims
- 0769US8659825B2Sample carrying apparatus capable of revolving sampleNAT UNIV TSING HUA·Filed 2012·Granted Feb 25, 2014·2 cites·14 claims
- 0851US7538025B2Dual damascene process flow for porous low-k materialsTAIWAN SEMICONDUCTOR MFG·Filed 2003·Granted May 26, 2009·3 cites·39 claims
- 0951US7436009B2Via structures and trench structures and dual damascene structuresTAIWAN SEMICONDUCTOR MFG·Filed 2007·Granted Oct 14, 2008·0 cites·8 claims
- 1047US7906273B2Method of manufacturing hollow micro-needle structuresNAT UNIV TSING HUA·Filed 2007·Granted Mar 15, 2011·0 cites·16 claims
- 1144US2008140195A1Multifunctional nano-probe interface structure for neural prostheses and manufacturing method thereofUNIV TSINGHUA·Filed 2007·Application pending·0 cites
- 1241US2009163003A1Manufacturing method of self-separation layerFU CHIEN-CHUNG·Filed 2008·Application pending·0 cites
- 1339US2018196353A1Multiphoton absorption lithography processing systemUNIV NAT TSING HUA·Filed 2017·Application pending·0 cites
- 1439US2009161210A1Microscopy system with revolvable stageFU CHIEN-CHUNG·Filed 2008·Application pending·0 cites
- 1539US2009162246A1Sample carrying apparatus capable of revolving sampleFU CHIEN-CHUNG·Filed 2008·Application pending·0 cites
- 1638US2009274019A1Optical Scanning Apparatus for Appliances for Recording or Reproducing Information Using an Optical Recording MediumBARTELS UWE·Filed 2005·Application pending·0 cites
- 1736US2010177190A1Microscopy system with revolvable stageCHIANG ANN-SHYN·Filed 2010·Application pending·0 cites
- 1833US9025133B2Laser interference lithography apparatus using fiber as spatial filter and beam expanderNAT UNIV TSING HUA·Filed 2013·Granted May 5, 2015·0 cites·14 claims
- 1932US2014010645A1Fan structureHuang li-jia·Filed 2012·Application pending·0 cites
- 2028US6505520B1Method for preparing a thermal pulsed micro flow senorIND TECH RES INST·Filed 1999·Granted Jan 14, 2003·0 cites·3 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →