Inventor · disambiguated record
Chaug-Liang Hsu
Also filed as: HSU CHAUG-LIANG
1 granted patent·2 pending applications·8 citations·filing 2002–2005
30Inventor score
Top patents by PatentIndex Score
3 records- 0149US6685543B2Compensating chemical mechanical wafer polishing apparatus and methodCHUNG SHAN INST OF SCIENCE·Filed 2002·Granted Feb 3, 2004·8 cites·10 claims
- 0233US2006101909A1Angular rate sensor with temperature compensation and vibration compensationLO YUAN·Filed 2005·Application pending·0 cites
- 0328US2004259481A1Method of polishing semiconductor copper interconnect integrated with extremely low dielectric constant materialCHUNG SHAN INST OF SCIENCE·Filed 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →