Inventor · disambiguated record
Che-Chang Hsu
Also filed as: HSU CHE-CHANG
20 granted patents·6 pending applications·15 citations·filing 2011–2024
91Inventor score
Top patents by PatentIndex Score
26 records- 0197US11086237B2Extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Aug 10, 2021·4 cites·20 claims
- 0294US12055865B2Extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 6, 2024·2 cites·20 claims
- 0393US10747119B2Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Aug 18, 2020·4 cites·20 claims
- 0486US2025110414A1Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0585US11982944B2Method of lithography process and transferring a reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 14, 2024·0 cites·20 claims
- 0684US12210295B2Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 28, 2025·0 cites·19 claims
- 0784US11204556B2Apparatus and method for monitoring reflectivity of the collector for extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Dec 21, 2021·1 cites·20 claims
- 0883US10877378B2Vessel for extreme ultraviolet radiation sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·2 cites·20 claims
- 0982US12379675B2Extreme ultraviolet lithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
- 1082US2024385540A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1181US10791616B1Radiation source apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 29, 2020·2 cites·20 claims
- 1280US11703763B2Method of lithography process using reticle container with discharging deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 18, 2023·0 cites·20 claims
- 1379US11650512B2Reticle cleaning device and method of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted May 16, 2023·0 cites·20 claims
- 1478US12189298B2EUV vessel perimeter flow auto adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jan 7, 2025·0 cites·20 claims
- 1578US2025076770A1New design of euv vessel perimeter flow auto adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1675US11320733B2Reticle with conductive material structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 3, 2022·0 cites·20 claims
- 1774US12265336B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Apr 1, 2025·0 cites·20 claims
- 1871US11747735B2EUV vessel perimeter flow auto adjustmentTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Sep 5, 2023·0 cites·20 claims
- 1964US10802394B2Method for discharging static charges on reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 13, 2020·0 cites·20 claims
- 2064US2025164892A1Lithography scanner throughputTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2163US11121018B2Method and apparatus for lithography in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 14, 2021·0 cites·20 claims
- 2256US10714371B2Method and apparatus for lithography in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 14, 2020·0 cites·20 claims
- 2354US2025102927A1Lithography system with fuel cell and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2447US11360392B2Photolithography device having illuminator and method for adjusting intensity uniformityTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jun 14, 2022·0 cites·20 claims
- 2544US10083377B2Sensing method for a counterfeit bill detectorCLIMAX MACHINE IND CO LTD·Filed 2017·Granted Sep 25, 2018·0 cites·12 claims
- 2634US2013103016A1Automatic beauty therapy equipmentCHANG YI-SAN·Filed 2011·Application pending·0 cites
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