Inventor · disambiguated record
Chansoo Kang
Also filed as: KANG CHANSOO
4 granted patents·3 pending applications·0 citations·filing 2021–2024
52Inventor score
Files withSAMSUNG ELECTRONICS CO LTD7
Top patents by PatentIndex Score
7 records- 0162US12087550B2Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·19 claims
- 0260US11996275B2Device for radical diagnostic in plasma processing chamber, radical diagnostic system having the same, and operating method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted May 28, 2024·0 cites·18 claims
- 0357US2025085445A1Plasma light detection system including a scintillating windowSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0456US2025046587A1Plasma diagnostic device, and semiconductor processing equipment using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0554US12431341B2Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0646US2024047247A1Semiconductor process deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0743US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →