Inventor · disambiguated record
Chung-En Kao
Also filed as: KAO CHUNG-EN
27 granted patents·3 pending applications·61 citations·filing 2000–2022
94Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD12TAIWAN SEMICONDUCTOR MFG6IND TECH RES INST4KAO CHUNG-EN2LIN BO-HUNG2
Top patents by PatentIndex Score
30 records- 0187US10190209B2PVD apparatus and method with deposition chamber having multiple targets and magnetsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Jan 29, 2019·4 cites·20 claims
- 0285US12226807B2Cleaning device for cleaning electroplating substrate holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 18, 2025·0 cites·20 claims
- 0385US9279179B2Multi coil target designTSAI MING-CHIN·Filed 2012·Granted Mar 8, 2016·4 cites·20 claims
- 0484US8926806B2Shielding design for metal gap fillTSAI MING-CHIN·Filed 2012·Granted Jan 6, 2015·6 cites·20 claims
- 0580US11230791B2Magnetic structure for metal plating controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 25, 2022·0 cites·20 claims
- 0680US9318364B2Semiconductor device metallization systems and methodsTAIWAN SEMICONDUCTOR MFG·Filed 2014·Granted Apr 19, 2016·3 cites·20 claims
- 0777US6743296B2Apparatus and method for self-centering a wafer in a sputter chamberTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Jun 1, 2004·21 cites·12 claims
- 0874US11111910B2Ultra high vacuum cryogenic pumping apparatus with nanostructure materialTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Sep 7, 2021·1 cites·20 claims
- 0973US11433440B2Cleaning device for cleaning electroplating substrate holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 6, 2022·0 cites·20 claims
- 1071US10121698B2Method of manufacturing a semiconductor deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 6, 2018·1 cites·20 claims
- 1169US9574265B2Rotation plus vibration magnet for magnetron sputtering apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Feb 21, 2017·1 cites·20 claims
- 1267US10526719B2Magnetic structure for metal plating controlTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Jan 7, 2020·0 cites·20 claims
- 1367US10307798B2Cleaning device for cleaning electroplating substrate holderTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jun 4, 2019·0 cites·11 claims
- 1466US8884526B2Coherent multiple side electromagnetsLIN BO-HUNG·Filed 2012·Granted Nov 11, 2014·2 cites·17 claims
- 1564US8953298B2Electrostatic chuck robotic systemKAO CHUNG-EN·Filed 2011·Granted Feb 10, 2015·2 cites·20 claims
- 1663US6652716B2Apparatus and method for self-aligning a cover ring in a sputter chamberTAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Nov 25, 2003·10 cites·12 claims
- 1762US7651025B2Guest-service-type convenience system for implementation at ticketing activity, touring activity and retail transactionIND TECH RES INST·Filed 2005·Granted Jan 26, 2010·1 cites·20 claims
- 1861US9982340B2Shower head apparatus and method for controlling plasma or gas distributionLEE CHIH TSUNG·Filed 2012·Granted May 29, 2018·2 cites·17 claims
- 1961US9708706B2PVD apparatus and method with deposition chamber having multiple targets and magnetsKAO CHUNG-EN·Filed 2011·Granted Jul 18, 2017·1 cites·20 claims
- 2060US9281221B2Ultra-high vacuum (UHV) wafer processingTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Mar 8, 2016·1 cites·20 claims
- 2160US9093252B2Rotation plus vibration magnet for magnetron sputtering apparatusLIN BO-HUNG·Filed 2012·Granted Jul 28, 2015·0 cites·19 claims
- 2257US9548241B2Semiconductor device metallization systems and methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jan 17, 2017·0 cites·20 claims
- 2356US10145371B2Ultra high vacuum cryogenic pumping apparatus with nanostructure materialTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Dec 4, 2018·0 cites·20 claims
- 2455US2003061086A1System and means for supporting transportations and distributionsIND TECH RES INST·Filed 2001·Application pending·0 cites
- 2551US2007162345A1Tax refund system and methodIND TECH RES INST·Filed 2006·Application pending·0 cites
- 2650US9865478B2Shielding design for metal gap fillTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jan 9, 2018·0 cites·20 claims
- 2748US6358851B1Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue)TAIWAN SEMICONDUCTOR MFG·Filed 2000·Granted Mar 19, 2002·1 cites·5 claims
- 2847US2006282334A1RFID-enabled personal shopping assistant system and methodIND TECH RES INST·Filed 2006·Application pending·0 cites
- 2940US9026241B2Closed loop control for reliabilityYANG WEN-CHENG·Filed 2012·Granted May 5, 2015·0 cites·16 claims
- 3034US6660125B2Sputter PM procedures with polish tool to effectively remove metal defects from target surface nodules (residue)TAIWAN SEMICONDUCTOR MFG·Filed 2001·Granted Dec 9, 2003·0 cites·5 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →