Inventor · disambiguated record
Chi-An Kao
Also filed as: KAO CHI-AN
5 granted patents·2 pending applications·61 citations·filing 2003–2013
80Inventor score
Files withCHENG FAN-TIEN2TAIWAN SEMICONDUCTOR MFG2FORESIGHT TECHNOLOGY COMPANY LTD1KAO CHI-AN1UNIV NAT CHENG KUNG1
Top patents by PatentIndex Score
7 records- 0193US7829815B2Adjustable electrodes and coils for plasma density distribution controlTAIWAN SEMICONDUCTOR MFG·Filed 2006·Granted Nov 9, 2010·25 cites·38 claims
- 0287US8688256B2Advanced process control system and method utilizing virtual metrology with reliance indexCHENG FAN-TIEN·Filed 2011·Granted Apr 1, 2014·12 cites·15 claims
- 0385US7603328B2Dual-phase virtual metrology methodUNIV NAT CHENG KUNG·Filed 2007·Granted Oct 13, 2009·14 cites·17 claims
- 0483US8983644B2Manufacturing execution system with virtual-metrology capabilities and manufacturing system including the sameCHENG FAN-TIEN·Filed 2010·Granted Mar 17, 2015·8 cites·17 claims
- 0543US2014222376A1Method for searching, analyzing, and optimizing process parameters and computer program product thereofFORESIGHT TECHNOLOGY COMPANY LTD·Filed 2013·Application pending·0 cites
- 0640US8207532B2Constant and reducible hole bottom CD in variable post-CMP thickness and after-development-inspection CDKAO CHI-AN·Filed 2003·Granted Jun 26, 2012·2 cites·10 claims
- 0737US2005228765A1Mechanism for synchronizing manafacturing information systems and document content management systems dataTAIWAN SEMICONDUCTOR MFG·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →