Inventor · disambiguated record
Chueh-Chi Kuo
Also filed as: KUO CHUEH-CHI
19 granted patents·9 pending applications·6 citations·filing 2018–2024
89Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD28
Top patents by PatentIndex Score
28 records- 0195US11520246B1Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·2 cites·19 claims
- 0294US11803129B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 31, 2023·3 cites·20 claims
- 0390US12164235B2Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Dec 10, 2024·1 cites·20 claims
- 0488US2025123576A1Systems for manufacturing semiconductor devicesTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0587US12210296B2Method of cleaning wafer table of photolithography system and method of manufacturing integrated circuitTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jan 28, 2025·0 cites·20 claims
- 0685US11982944B2Method of lithography process and transferring a reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 14, 2024·0 cites·20 claims
- 0781US11953839B2Highly efficient automatic particle cleaner method for EUV systemsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 0880US12362218B2Substrate holder and methods of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Jul 15, 2025·0 cites·20 claims
- 0980US11703763B2Method of lithography process using reticle container with discharging deviceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jul 18, 2023·0 cites·20 claims
- 1079US12360464B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 15, 2025·0 cites·20 claims
- 1177US2025053103A1Semiconductor processing tool and methods of operationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1276US2024383013A1Onsite cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 1375US11782350B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Oct 10, 2023·0 cites·20 claims
- 1475US11320733B2Reticle with conductive material structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 3, 2022·0 cites·20 claims
- 1574US12283512B2Semiconductor processing method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 22, 2025·0 cites·20 claims
- 1670US12420313B2Onsite cleaning system and methodTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 23, 2025·0 cites·20 claims
- 1769US11520243B2Lithography system and method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Dec 6, 2022·0 cites·20 claims
- 1868US12009246B2Substrate holder and methods of useTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 11, 2024·0 cites·20 claims
- 1965US2025306467A1Lithographic apparatus, inspection method, and method for performing lithography processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 2064US10802394B2Method for discharging static charges on reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Oct 13, 2020·0 cites·20 claims
- 2163US11830754B2Semiconductor processing method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 28, 2023·0 cites·20 claims
- 2263US11121018B2Method and apparatus for lithography in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Sep 14, 2021·0 cites·20 claims
- 2356US10714371B2Method and apparatus for lithography in semiconductor fabricationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jul 14, 2020·0 cites·20 claims
- 2455US2025164899A1Apparatuses and methods for reducing particle contamination of wafers during transferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 2555US2023393489A1Detection method of euv pellicle statusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2653US2024045323A1Reticle covering pellicle for photolithogrphy scannerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
- 2752US2022299882A1System and method for cleaning an euv mask within a scannerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 2849US2024006202A1Apparatuses and methods for reducing particle contamination of wafers during transferTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →