Inventor · disambiguated record

Chunghun Lee

Also filed as: LEE CHUNGHUN

1 granted patent·1 pending application·0 citations·filing 2017–2021

1Inventor score

Technology areasH10P

Files withSAMSUNG ELECTRONICS CO LTD2

Top patents by PatentIndex Score

2 records

0138US12362216B2Plasma processing apparatus and semiconductor fabrication method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Jul 15, 2025·0 cites·16 claims
0222US2018040496A1Electrostatic chuck system and control method thereofSAMSUNG ELECTRONICS CO LTD·Filed 2017·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →