Inventor · disambiguated record

Chi-Hung Liao

Also filed as: LIAO CHI-HUNG

119 granted patents·24 pending applications·185 citations·filing 1999–2025

99Inventor score

Technology areasH10P G03F H05G H10W B01J

Files withTAIWAN SEMICONDUCTOR MFG CO LTD113 TAIWAN SEMICONDUCTOR MFG9 LIN HUI-HSIUNG4 IND TECH RES INST3 CHANG CHAN-CHING2

Top patents by PatentIndex Score

143 records

0196US11409201B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Aug 9, 2022·2 cites·20 claims
0296US11243478B2System and method for thermal management of reticle in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Feb 8, 2022·3 cites·20 claims
0395US11513083B2Photolithography method and photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Nov 29, 2022·2 cites·20 claims
0493US11579539B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Feb 14, 2023·3 cites·20 claims
0593US10514607B1Radiation source supply system for lithographic toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 24, 2019·3 cites·19 claims
0692US11988972B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted May 21, 2024·2 cites·20 claims
0791US8870431B2Light mixing moduleLIN HUI-HSIUNG·Filed 2011·Granted Oct 28, 2014·32 cites·22 claims
0891US2025355359A1Dispensing nozzle design and dispensing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
0990US11003087B2Radiation source supply system for lithographic toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 11, 2021·2 cites·20 claims
1089US11550233B2Lithography system and operation method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jan 10, 2023·2 cites·20 claims
1189US11092892B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 17, 2021·2 cites·20 claims
1288US10971352B2Cleaning method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Apr 6, 2021·3 cites·20 claims
1388US10948824B2Dispensing nozzle design and dispensing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 16, 2021·3 cites·12 claims
1487US12443117B2Methods and apparatus for reducing hydrogen permeation from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Oct 14, 2025·0 cites·20 claims
1587US11687012B2Reduce mask defect impact by contamination decomposeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Granted Jun 27, 2023·1 cites·20 claims
1687US10867824B2Substrate detecting system in a substrate storage containerTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 15, 2020·3 cites·20 claims
1787US10777121B1Power circuit, gate driver and related operation control method for multi-source display systemHIMAX TECH LTD·Filed 2019·Granted Sep 15, 2020·6 cites·12 claims
1885US10636702B2Conductive interconnect structures in integrated circuitsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 28, 2020·4 cites·20 claims
1985US10073354B2Exposure method of wafer substrate, manufacturing method of semiconductor device, and exposure toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Sep 11, 2018·3 cites·20 claims
2084US12048944B2Method of operating drippage prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted Jul 30, 2024·1 cites·20 claims
2183US12429775B2Dispensing nozzle design and dispensing method thereofTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Sep 30, 2025·0 cites·20 claims
2283US12347716B2Method for cleaning electrostatic chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 1, 2025·0 cites·20 claims
2383US12287590B2Reduce mask defect impact by contamination decomposeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Apr 29, 2025·0 cites·20 claims
2483US8965102B2System and method for defect analysis of a substrateTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Feb 24, 2015·8 cites·10 claims
2583US2024134293A1System and method for thermal management of reticle in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
2683US2025329521A1Semiconductor tool for copper depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
2782US12379674B2Method and apparatus for improving critical dimension variationTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Granted Aug 5, 2025·0 cites·20 claims
2882US12170218B2Method for cleaning electrostatic chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Dec 17, 2024·0 cites·20 claims
2982US11959864B2Photolithography method and photolithography systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
3082US11809084B2Radiation source supply system for lithographic toolsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 7, 2023·0 cites·20 claims
3182US11448955B2Mask for lithography process and method for manufacturing the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 20, 2022·2 cites·20 claims
3282US11003091B2Method of fabricating reticleTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2020·Granted May 11, 2021·1 cites·20 claims
3382US2024246124A1Apparatus and methods for exhaust cleaningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
3481US12025922B2Methods and apparatus for reducing hydrogen permeation from lithographic toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Jul 2, 2024·0 cites·20 claims
3581US12007691B2Substrate measuring device and a method of using the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Jun 11, 2024·0 cites·20 claims
3681US2025372376A1Euv photomask and related methodsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
3780US12394611B2Semiconductor tool for copper depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Granted Aug 19, 2025·0 cites·20 claims
3880US11923187B2Cleaning method and apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Mar 5, 2024·0 cites·20 claims
3980US7541311B2Vermiculite supported catalyst for CO preferential oxidation and the process of preparing the sameINST NUCLEAR ENERGY RES·Filed 2007·Granted Jun 2, 2009·9 cites·21 claims
4080US2025216804A1Reduce mask defect impact by contamination decomposeTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
4179US11899377B2System and method for thermal management of reticle in semiconductor manufacturingTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Feb 13, 2024·0 cites·20 claims
4279US11056371B2Tool and method for cleaning electrostatic chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Jul 6, 2021·1 cites·20 claims
4379US10710287B2Injection molding method and mold mechanismTAIWAN GREEN POINT ENTPR CO·Filed 2018·Granted Jul 14, 2020·2 cites·13 claims
4479US10678146B2Particle removal from wafer table and photomaskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jun 9, 2020·1 cites·20 claims
4579US9734572B2System and method for defect analysis of a substrateTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Aug 15, 2017·4 cites·13 claims
4679US2024312814A1Method of operating a processing apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
4778US10879114B1Conductive fillTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Dec 29, 2020·2 cites·20 claims
4878US10877382B2Method for handling mask and lithography apparatusTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Dec 29, 2020·3 cites·20 claims
4978US2024342745A1Method of operating drippage prevention systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
5078US2024160106A1Method and apparatus for controlling droplet in extreme ultraviolet light sourceTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites

Showing the top 50 of 143 patent records by PatentIndex Score.

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →