Inventor · disambiguated record
Changsoon Lim
Also filed as: LIM CHANGSOON
3 granted patents·3 pending applications·0 citations·filing 2021–2024
39Inventor score
Files withSAMSUNG ELECTRONICS CO LTD6
Top patents by PatentIndex Score
6 records- 0162US12087550B2Device for measuring density of plasma, plasma processing system, and semiconductor device manufacturing method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 10, 2024·0 cites·19 claims
- 0258US2025218752A1Substrate processing apparatus, substate processing method using the same, and method of manufacturing semiconductor device using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0356US2025201541A1Arcing detection sensor and plasma treating apparatus including the sameSAMSUNG ELECTRONICS CO LTD·Filed 2024·Application pending·0 cites
- 0454US12431341B2Apparatus for arcing diagnosis, plasma process equipment including the same, and arcing diagnosis methodSAMSUNG ELECTRONICS CO LTD·Filed 2022·Granted Sep 30, 2025·0 cites·20 claims
- 0546US2024047247A1Semiconductor process deviceSAMSUNG ELECTRONICS CO LTD·Filed 2023·Application pending·0 cites
- 0643US11940620B2Method of cleaning collector of EUV light source systemSAMSUNG ELECTRONICS CO LTD·Filed 2021·Granted Mar 26, 2024·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →