Inventor · disambiguated record
Chung-Tsung Lu
Also filed as: LU CHUNG-TSUNG
3 granted patents·1 pending application·14 citations·filing 2008–2024
65Inventor score
Technology areasH10P
Top patents by PatentIndex Score
4 records- 0176US7995323B2Method and apparatus for securely dechucking wafersTAIWAN SEMICONDUCTOR MFG·Filed 2008·Granted Aug 9, 2011·7 cites·33 claims
- 0272US8416555B2System for securely dechucking wafersLU CHUNG-TSUNG·Filed 2011·Granted Apr 9, 2013·5 cites·20 claims
- 0362US8000081B2Method and apparatus for safely dechucking wafersTAIWAN SEMICONDUCTOR MFG·Filed 2008·Granted Aug 16, 2011·2 cites·21 claims
- 0458US2025379086A1Monitoring system, mark detection apparatus and monitoring method for healthy of electrostatic chuckTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →