Inventor · disambiguated record
Cheng-Hsin Ma
Also filed as: MA CHENG-HSIN
1 granted patent·2 pending applications·1 citations·filing 2007–2010
17Inventor score
Top patents by PatentIndex Score
3 records- 0152US8399158B2High resolution phase shift maskCHOI CHANG JU·Filed 2010·Granted Mar 19, 2013·1 cites·22 claims
- 0235US2011159411A1Phase-shift photomask and patterning methodOLSON BENNETT·Filed 2009·Application pending·0 cites
- 0334US2009001057A1Dual damascene trench depth detection and control using voltage impedance RF probeMA CHENG-HSIN·Filed 2007·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →