Inventor · disambiguated record

Chiaki Nakagawa

Also filed as: NAKAGAWA CHIAKI

1 granted patent·1 pending application·15 citations·filing 2004–2005

36Inventor score

Technology areasG03F

Files withNAKAGAWA CHIAKI1 NIKON CORP1

Top patents by PatentIndex Score

2 records

0170US7817242B2Exposure method and device manufacturing method, exposure apparatus, and programNIKON CORP·Filed 2004·Granted Oct 19, 2010·15 cites·19 claims
0223US2008100811A1Exposure Apparatus and Device Manufacturing MethodNAKAGAWA CHIAKI·Filed 2005·Application pending·0 cites

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →